JPH03118545U - - Google Patents
Info
- Publication number
- JPH03118545U JPH03118545U JP2785590U JP2785590U JPH03118545U JP H03118545 U JPH03118545 U JP H03118545U JP 2785590 U JP2785590 U JP 2785590U JP 2785590 U JP2785590 U JP 2785590U JP H03118545 U JPH03118545 U JP H03118545U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- processing
- vacuum valve
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2785590U JPH03118545U (en]) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2785590U JPH03118545U (en]) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03118545U true JPH03118545U (en]) | 1991-12-06 |
Family
ID=31530689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2785590U Pending JPH03118545U (en]) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03118545U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010081828A (ja) * | 2008-09-30 | 2010-04-15 | Takako Hagiwara | 低放射線ホルミシス動物舎 |
-
1990
- 1990-03-19 JP JP2785590U patent/JPH03118545U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010081828A (ja) * | 2008-09-30 | 2010-04-15 | Takako Hagiwara | 低放射線ホルミシス動物舎 |